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[September 2000]
New In-Lens FESEM Gives Significantly Improved Resolution and Imaging Capabilities
The new Windows NT-controlled S-5200 in-lens cold cathode field emission scanning electron microscope from Hitachi Scientific Instruments produces exceptional image quality with significantly improved resolution capabilities throughout the accelerating voltage range. The new microscope can deliver 0.5 nm resolution at 30 kV and 1.8 nm at just 1 kV.
A number of new design features have been introduced to produce this outstanding performance, including the minimisation of surface degradation through the use of a completely dry vacuum system right through to the rough pumping level and electrostatic beam blanking.
The S-5200 also offers versatile imaging options. Hitachi's proprietary EXB electron filter offers highly efficient signal collections, whilst the use of a variable bias electrode allows sophisticated signal selection and mixing. Software-controlled low pass or high pass filters can be used to give pure secondary electron signals or to vary secondary electron and backscattered electron contributions. In this way, charging problems can be eliminated and compositional contrast can be obtained at accelerating voltages as low as 500 V. Optional dedicated backscattered electron detectors are also available.
The S-5200 is also designed for elemental analysis and a side entry EDX system may also be fitted.
ENDS