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[Oct 2006]
Versatile Vacuum System for Thin Film Deposition
New from the Diamonex® Products Division of Morgan Advanced Ceramics (Allentown, PA, USA), is a stand-alone, fully automated thin-film chemical vapour deposition (CVD) system, ideal for research, prototyping or entry-level production applications. The new system is said to be highly versatile, offering any combination of substrate etching, cleaning and deposition of metal, oxide, nitride, dielectric layers or diamond-like carbon (DLC), including multiple layers.
The Diamonex CVD System can be used for processing and coating of wafers or samples up to 200mm in diameter. It features the Diamonex closed drift CD SOURCETM for etching, ion-assisted deposition or direct ion beam deposition, a magnetron source for RF or DC magnetron sputtering, an RF substrate stage for plasma-enhanced CVD capability and easy-to-use Windows(tm)-based control software. Supplied complete and ready-to-use, the Diamonex CVD System is claimed to be a practical and cost effective option for small volume applications such as medical components, optical products or semiconductor prototypes. Optional load lock chambers greatly increase processing throughput for many applications.
The patented Diamonex CD Source is a reliable, low voltage high current gridless ion source. It is compatible with a wide variety of inert and reactive gases, hydrocarbons and precursors including argon, oxygen, methane and ammonia.
Users of the new Diamonex CVD System can choose up to two three-inch magnetron sources with shared or dedicated power supplies for deposition of standard metallic, dielectric, insulating and magnetic materials, using DC and RF techniques.
The system can be used for plasma-enhanced CVD, in applications that require pre-clean, etching and ion-assisted depositions at lower temperatures.
Set up and control of the Diamonex CVD System is simple, thanks to the friendly interface. Basic procedures are built-in, or users can create and store their own recipes, with data logging of critical parameters. There is a user-adjustable alarm function and multiple security levels for the protection of people and plant.
www.diamonex.com
www.morganadvancedceramics.com
ENDS