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[May 2003]
Hitachi Announced Ultra-High Resolution Field Emission SEM
The S-4300SE/N field emission variable pressure scanning electron microscope
has been announced by Hitachi High-Technologies Corporation (Wokingham,
Berks, England). It combines the high resolution and image quality of a
field emission source with the versatility of variable pressure operation to
handle difficult samples.The new microscope has a pressure operating range of 10 Pa to 1,000 Pa which
means that it can be used to examine an even wider range of wet, oily or
non-conducting samples than many VPSEMS. These types of samples, explained
Hitachi, cannot be easily imaged at all in conventional SEMs without using
specialised sample preparation techniques.The thermal Schottky emission electron source offers high brightness and
excellent resolution over a wide range of accelerating voltages. High
resolution can be achieved in both high pressure and high vacuum modes,
using a variety of detectors such as secondary electron, backscattered
electron and Hitachi's optional Environmental Secondary Electron Detector
(ESED).The company said that the exceptional long-term beam stability of the
S-4300SE/N made it ideally suited to elemental analysis. The microscope is
fully compatible with energy dispersive X-ray (EDX) spectrometers and the
latest parallel beam spectrometers which give increased elemental
sensitivity, especially for light elements.Samples up to 160mm in diameter can be accommodated in the large specimen
chamber and there is a choice of two 5-axis stages with eucentric tilt. The
larger stage has 100mm X movement and 50mm Y movement and 360° rotation,
together with comprehensive Z and tilt capabilities.The instrument has extensive automated features, including autofocus,
autostigmator, autobrightness and autocontrast. Images are acquired
digitally and image processing and image management systems are incorporated
in the instrument.
ENDS