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[May 2002]
New Ultra-High Resolution FESEM for Large Samples
A new FESEM which is claimed to combine the resolution capabilities normally associated with in-lens instruments with the sample handling of more conventional FESEMs has been added to its range by Hitachi High-Technologies Corp. The S-4800 FESEM features a new objective lens design and enhanced E X B filter technology to collect and separate the various signals from pure secondary electrons, compositional secondary electrons and backscattered electrons.This new electron optical arrangement allows the instrument, says Hitachi, to offer superb resolution figures of 1.0nm at 15kV and 2.0nm at 1kV, comparable to many in-lens FESEMs. To obtain the greatest benefit from these resolution capabilities, the S-4800 also features redesigned specimen stages and a dry pumping system using a turbomolecular pump to avoid contamination.
There is a choice of specimen stages. The Type I stage offers XY movements of 50mm x 50mm together with comprehensive Z and tilt capabilities.
The Type II stage is used in conjunction with an 8in diameter chamber and will accommodate even bigger samples with its 110mm x 110mm XY movement and increased Z movement. All five axes on this stage are motorised and operate under graphical software control. The rugged design of these stages is said to eliminate any vibration to ensure that the user can make the most of the resolution capabilities.
The enhanced E X B filter technology brings four times greater collection efficiency for low energy backscattered electrons than the standard E X B filter system, ensuring the production of outstanding backscattered electron images at low accelerating voltages, adds Hitachi.
ENDS