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[June 2005]
Exceptional Sensitivity Claimed for SEM
A new, five-segment semiconductor backscattered electron detector with high sensitivity and fast response rates has been introduced for the S-3400N variable pressure SEM from Hitachi High-Technologies Corp (Wokingham, Berks, England). The detector can be used for both variable pressure and high vacuum imaging.
This new detector gives exceptional sensitivity, says the company, especially at low accelerating voltages. The high sensitivity allows smaller spot sizes and beam currents to be used in BSD imaging leading to improved resolution and lower risk of beam damage on delicate, uncoated specimens. The detector also works at TV scan rates, making it easier to find the required field of view.
The detector features five, independently selectable segments, instead of the four found on conventional multi-segment detectors. Selection of the appropriate combinations of segments allows the detector to be switched between a number of different imaging modes. This not only gives the traditional topographic and atomic number contrast imaging modes associated with backscattered electron imaging, but the fifth segment allows the detector to produce 3D images as well.
www.hitachi-hitec-uk.com
ENDS