 |
 |
||||||
[July 2003]
Diamonex Cd Source From Morgan Advanced CeramicsOffers High Ion Flux Potential In Surface Engineering
Morgan Advanced Ceramics (MAC), a world-leading supplier of innovative ceramic solutions for the medical, telecommunications, semiconductor and aerospace markets, introduces its Diamonex® Closed-drift (CD) Source??. The Diamonex CD Source is a flexible source ideally suited to a wide range of manufacturing processes that benefit from high flux ions, including substrate cleaning, reactive ion beam etching, and ion beam assisted deposition of thin films. It is also a useful tool for high-rate, reliable deposition of diamond-like coatings (DLC).
The gridless design of the Diamonex CD Source allows a high ion flux, and the substrate will not be contaminated by particles released by the grid. The CD Source includes an integrated, on-axis hollow cathode electron source (HCES), eliminating filaments that burn out or contaminate substrates. The hollow cathode produces a charge-neutralized beam so that no substrate bias is required. The unique anode design allows for stable, long-term operation with no process gas restriction. Using an electromagnet, the CD Source allows flexibility for process development by enhancing and refining the coating material properties.
The Diamond CD Source is available in a compact flange or internally-mounted housing operated using state-of-the-art DC and AC power supplies for maximum reliability. There are no RF interference issues with this source.
ENDS