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[February 2002]
Improved Low kV Performance for Scanning Electron Microscope
Hitachi High-Technologies Corporation has announced a number of improvements for the S-4700 field emission SEM, which are said to now give better image quality, particularly at low accelerating voltages. These include the introduction of a new snorkel objective lens and a new through-the-lens (TTL) detection system.The new lens has been designed using the latest electron optical theory and allows a guaranteed resolution of just 2.1nm to be obtained at an accelerating voltage of 1kV. Resolution of 1.5nm at 15kV and 12mm working distance (the X-ray analysis position) is retained with the new lens.
The new TTL detection systems is claimed not only to provide ultra-high resolution performance using E x B energy filtered Secondary Electrons (SE), but also to allow mixing of SE and BSE (Backscattered Electrons) using a retarding/accelerating plate. This eliminates charging problems and allows imaging of atomic number contrast of any sample at low accelerating voltages.
Examples of the ultra-high resolution imaging are shown in a brand new brochure for the S-4700, as are the imaging capabilities provided by the new E x B filter electron detector. Requests for the brochure can be e-mailed to: info@hitachi-hitec-uk.com
ENDS