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[August 2004]
Hitachi Offers Variable Pressure Operation on SEM
The S-4300SE/N from Hitachi High-Technologies Corp (Wokingham, Berks,
England) is claimed to provide a unique combination of a field emission source and variable pressure in a truly analytical instrument. The use of a Schottky thermal FE source gives excellent resolution, adds Hitachi, yet also provides sufficient beam current for both EDX and WDX analysis.The flexibility of variable pressure operation means that difficult wet, oily and non-conductive specimens can be examined without sample preparation. The S-4300SE/N offers an unusually large operating pressure range of 10Pa to 1000Pa. For secondary electron images at high pressure, the instrument can be fitted with Hitachi's 'Environmental Secondary Electron Detector'.
The instrument can be simultaneously equipped with EDX, WDX, cathodoluminescence and electron backscattered pattern (EBSD), as well as being fitted with beam blanking plates to allow electron beam lithography to be carried out. This makes the instrument, says the company, one of the most versatile analytical microscopes available.
www.hitachi-hitec-uk.com
ENDS