 |
 |
||||||
[April 2004]
30% Resolution Improvement for Hitachi's FESEM
Beam Deceleration Technology has been introduced as an option for the S-4800 field emission scanning electron microscope (FESEM) from Hitachi High-Technologies Corporation (Wokingham, Berks, England). This offers even better resolution capabilities at low accelerating voltages, with an improvement in resolution of 30% to 1.4nm at 1kV.
The S-4800 can accommodate samples up to 200mm diameter yet offers near in-lens resolution capabilities thanks to its novel electron optical design, ultra-clean pumping and anti-vibration stage design.
The Beam Deceleration option makes use of the fact that the higher accelerating voltage in the primary beam the lower the chromatic aberration and thus smaller spot sizes can be achieved. Therefore the new option uses a higher primary accelerating voltage and then decelerates the beam just before it interacts with the sample by applying a negative voltage to the sample. The net 'landing voltage' - which is the effective accelerating voltage at the specimen - is the difference between the primary beam voltage and the applied sample voltage.
In addition to producing images with the resolution characteristics of the primary beam, the image also has the topographic characteristics of the low voltage image, resulting in enhanced surface detail.
www.hitachi-hitec-uk.com
ENDS